Meanwhile, the comparison between some factors, such as anodic voltage, product concentration and current efficiency, of Ti Ru, and Ti PbO 2 electrodes was conducted. 并从阳极电位、产品浓度、产品效率等方面对两种阳极材料进行了综合比较。
Based on anodic current, MRR and inhibit efficiency, experiment conditions such as electrolyte and a range of voltage can be optimized. 以阳极电流、材料去除率、腐蚀抑制效率等参数为依据优选了抛光液和电压范围等ECMP试验条件。